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Al-Adab al-Mufrad 636
وَقَالَ النَّبِيُّ صلى الله عليه وسلم: مَنْ هَلَّلَ مِئَةً، وَسَبَّحَ مِئَةً، وَكَبَّرَ مِئَةً، خَيْرٌ لَهُ مِنْ عَشْرِ رِقَابٍ يُعْتِقُهَا، وَسَبْعِ بَدَنَاتٍ يَنْحَرُهَا.
The Prophet, may Allah bless him and grant him peace, said, "If someone says, 'There is no god but Allah' one hundred times, 'Glory be to Allah' one hundred times' and 'Allah is greater' one hundred times, that is better than freeing ten slaves and slaughtering seven camels."
Cited in Al-Adab al-Mufrad (No. 636).